氮化物硬质膜退除技术的研究进展
Research Progress on Stripping Technology of Nitride Hard Films
Online published: 2025-07-10
张东阳, 张钧, 张热寒, 王聪 . 氮化物硬质膜退除技术的研究进展[J]. 材料保护, 2021 , 54(8) : 127 . DOI: 10.16577/j.cnki.42-1215/tb.2021.08.023
Key words: nitride hard film; stripping; tools; research progress
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