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试验研究

冷热复合处理对CrN涂层结构及力学性能的影响

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  • (南京航空航天大学机电学院, 江苏 南京 210016)

王谦之(1985-),工学博士,副教授,主要研究方向为摩擦学及表面工程,电话:13951897235,E-mail:qz.wang@nuaa.edu.cn



收稿日期: 2023-03-24

  修回日期: 2023-04-23

  录用日期: 2023-05-12

  网络出版日期: 2023-09-15

基金资助

国家自然科学基金青年基金(51705245)资助

Influence of Cold-Thermal Composite Treatment on the Structure and Mechanical Properties of CrN Coatings

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  • (College of Mechanical & Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)

Received date: 2023-03-24

  Revised date: 2023-04-23

  Accepted date: 2023-05-12

  Online published: 2023-09-15

Supported by


摘要

为了改善CrN 涂层的塑性变形能力,通过增强阴极弧磁控溅射技术在316L 不锈钢上制备了CrN 涂层。 利用管式炉和液氮对CrN 涂层分别进行冷处理、热处理以及冷热复合处理。 通过X 射线衍射仪(XRD)、X 射线光电子能谱仪(XPS)、扫描电子显微镜(SEM)以及纳米压痕仪表征涂层在后处理前后的微观结构、形貌特征、残余应力及力学性能。 结果表明:经过后处理的CrN 涂层硬度均有小幅度降低,但其塑性变形能力均提高。 其中,先热后冷复合处理几乎保持CrN 涂层硬度不变(仅降低0.7%),同时提高了其塑性变形能力(提高3.1%),增强了其韧性。

本文引用格式

朱睿, 王谦之 . 冷热复合处理对CrN涂层结构及力学性能的影响[J]. 材料保护, 2023 , 56(9) : 48 -53 . DOI: 10.16577/j.issn.1001-1560.2023.0211

Abstract

In order to improve the plastic deformation ability of CrN coatings, CrN coatings were deposited on 316L stainless steel by enhanced cathode arc magnetron sputtering.Afterwards,the CrN coatings were post-treated by cold,thermal or cold-thermal composite treatment via tube furnace and liquid nitrogen.The microstructure, morphology, residual stress and mechanical properties of coatings before and after post-treatment were analyzed by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM) and nanoindenter.Results showed that the hardness of the CrN coating decreased slightly after post-treatment, but its plastic deformation ability increased.Among them, the composite treatment of heating first and then cooling almost kept the hardness of the CrN coating unchanged (only decreased by 0.7%), while improved its plastic deformation ability (increased by 3.1%) with enhancing its toughness.

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