为了促进类金刚石(DLC)薄膜在恶劣的海洋环境中的应用,采用磁控溅射技术在304不锈钢上沉积CrN-DLC薄膜。利用SEM、拉曼光谱仪、XPS、 EDS、纳米压痕仪、摩擦试验机、三维轮廓仪、电化学工作站测试表征了不同氮气流量条件下制备的CrN-DLC薄膜的表面和截面形貌、微观键合结构、化学键状态、成分和元素分布、硬度、摩擦学性能和耐腐蚀性能。结果表明:CrN-DLC薄膜的表面组织结构致密,无明显的缺陷,同时沉积的薄膜均为非晶结构。通入2 mL/min N2时,薄膜的弹性回复率达到55%,表明CrN-DLC薄膜具有良好的韧性,该条件下制备的薄膜在模拟海水中与Si3N4球摩擦的磨损率仅为8.63×10-10 m3/(N·m)。在电化学测试中,所有CrN-DLC薄膜的阳极极化曲线均表现出明显的钝化现象,其中,通入2 mL/min N2时,薄膜的腐蚀电流密度比304不锈钢低2个数量级,表现出良好的耐腐蚀性能。CrN-DLC薄膜的结构设计及元素掺杂能有效提高304不锈钢的减摩耐磨性能及耐腐蚀性能,拓宽了DLC薄膜在海洋环境中的应用。
In order to promote the application of diamond-like carbon (DLC) coatings in harsh marine environments, magnetron sputtering technology was used to deposit CrN-DLC coatings on 304 stainless steel. Subsequently, SEM, Raman spectrometer, XPS, EDS, nanoindentation instrument, friction testing machine, three-dimensional profilometer, and electrochemical workstation were utilized to analyze the surface and cross-sectional morphology, microscopic bonding structure, chemical bonding state, composition and element distribution, hardness, tribological properties and corrosion resistance of CrN-DLC films prepared under different nitrogen flow conditions. Results showed that the CrN-DLC coatings had a dense surface structure with no obvious defects, and the deposited coatings were all amorphous in structure. The coatings showed a 55% elastic recovery rate when 2 mL/min N2 was passed through, indicating that the CrN-DLC coatings had good toughness, and the wear rate of the coating prepared under this condition under simulated seawater rubbing against Si3N4 balls was only 8.63×10-10 m3/(N·m). In the electrochemical tests, the anodic polarization curves of all CrN-DLC coatings showed obvious passivation phenomenon. Among them, the corrosion current density of the coating through the 2 mL/min N2 was 2 orders of magnitude lower than that of 304 stainless steel, showing good corrosion resistance. Generally, the structural design and elemental doping of the CrN-DLC coatings could effectively improve the wear and corrosion resistance of 304 stainless steel, which enhanced the application of DLC coatings in the marine environment.
