脉冲电弧离子镀工艺参数对氧化锌压电涂层结构与电阻的影响

步天龙, 贾杰, 李迪, 张大沛, 寇汉鹏, 李文竹, 邓建钢, 兰贞波, 徐卓林

doi:10.16577/j.issn.1001-1560.2024.0114

材料保护 >

2024 , Vol. 57 >Issue 5: 158 - 164

DOI: https://doi.org/10.16577/j.issn.1001-1560.2024.0114

工艺篇

脉冲电弧离子镀工艺参数对氧化锌压电涂层结构与电阻的影响

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(1. 国网内蒙古东部电力有限公司呼伦贝尔供电公司，内蒙古呼伦贝尔 021000；2. 国网电力科学研究院武汉南瑞有限责任公司，湖北武汉 430074)

兰贞波(1988-)，硕士，高级工程师，研究方向为电气工程，E-mail:396687424@ qq.com

收稿日期: 2023-10-07

修回日期: 2023-12-13

录用日期: 2023-12-25

网络出版日期: 2024-05-31

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Effects of Pulsed Arc Ion Plating Process Parameters on Structure and Resistance of Zinc Oxide Piezoelectric Coating

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(1. State Grid East Inner Mongolia Electric Power Co.，Ltd. Hulun Buir Power Supply Company，Hulun Buir 021000，China；2. Wuhan NARI Limited Liability Company of State Grid Power Research Institute，Wuhan 430074，China)

LAN Zhenbo(1988-)，Master，Senior Engineer，Research Focus: Electrical Engineering，E - mail:396687424@qq.com

Received date: 2023-10-07

Revised date: 2023-12-13

Accepted date: 2023-12-25

Online published: 2024-05-31

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摘要

为了给探索、提升ZnO压电薄膜的制备工艺提供一定的科学参考及依据，通过脉冲电弧离子镀的方法在不锈钢基底上沉积结合力强的纳米氧化锌(ZnO)压电涂层，并系统研究工作气压及靶基距这2个关键制备工艺参数对ZnO压电传感涂层的晶体结构及电阻性能的影响。结果表明：工作气压降低则涂层结晶度提高，而随靶基距增大，结晶度先增加后降低，电阻随之降低。这一结果为新型永久薄膜压力传感器(PMTS)在高压及超高压智能套管的压力监测领域的应用提供了一定的科学参考及依据。

关键词： 脉冲电弧离子镀; 氧化锌; 压电传感器; 晶体结构; 电阻

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步天龙, 贾杰, 李迪, 张大沛, 寇汉鹏, 李文竹, 邓建钢, 兰贞波, 徐卓林 . 脉冲电弧离子镀工艺参数对氧化锌压电涂层结构与电阻的影响[J]. 材料保护, 2024 , 57(5) : 158 -164 . DOI: 10.16577/j.issn.1001-1560.2024.0114

Abstract

In order to provide a scientific reference and basis for exploring and enhancing the fabrication process of ZnO piezoelectric thin films, nanoscale ZnO piezoelectric coatings with strong adhesion were deposited on stainless steel substrates using the pulsed arc ion plating method. The effects of two critical fabrication process parameters, namely working gas pressure and target-to-substrate distance, on the crystal structure and electrical resistance properties of the ZnO piezoelectric sensor coatings were systematically studied. Results showed that a reduction in working gas pressure led to an improvement in the crystallinity of the coatings. As target-to-substrate distance increased, the crystallinity first increased and then decreased, resulting in a decrease in resistance. These findings provided a scientific reference and basis for the application of new permanent thin-film pressure sensors(PMTS) in the pressure monitoring of high and ultra-high-voltage smart casings.

Key words： pulsed arc ion plating; zinc oxide; piezoelectric sensors; crystal structure; resistance

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