磁控溅射技术制备氮化钛薄膜的研究进展
李昌恒, 刘奎仁, 魏世丞, 韩庆, 王博, 王玉江
Research Progress of Titanium Nitride Thin Films Prepared by Magnetron Sputtering Technology
LI Chang-heng, LIU Kui-ren, WEI Shi-cheng, HAN Qing, WANG Bo, WANG Yu-jiang
材料保护
.
2023, (2): 111
-119
.
DOI: 10.16577/j.issn.1001-1560.2023.0041
