脉冲电弧离子镀工艺参数对氧化锌压电涂层结构与电阻的影响
步天龙, 贾杰, 李迪, 张大沛, 寇汉鹏, 李文竹, 邓建钢, 兰贞波, 徐卓林
Effects of Pulsed Arc Ion Plating Process Parameters on Structure and Resistance of Zinc Oxide Piezoelectric Coating
BU Tianlong, JIA Jie, LI Di, ZHANG Dapei, KOU Hanpeng, LI Wenzhu, DENG Jiangang, LAN Zhenbo, XU Zhuolin
材料保护
.
2024, (5): 158
-164
.
DOI: 10.16577/j.issn.1001-1560.2024.0114
