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高功率脉冲磁控溅射制备TiN和TiAlSiN纳米涂层的腐蚀磨损性能
车智强, 闫旺, 酆毅, 张越, 宗鹏安
Study on the Corrosion and Wear Properties of TiN and TiAlSiN Nanocoatings Prepared by High-Power Pulsed Magnetron Sputtering
CHE Zhiqiang, YAN Wang, FENG Yi, ZHANG Yue, ZONG Peng'an
材料保护 . 2025, (1): 97 -102 .  DOI: 10.16577/j.issn.1001-1560.2025.0011