含Nb氮化物硬质膜的研究现状及展望

苏富斌, 张钧, 王晓阳, 钱春晖, 陈磊

doi:10.16577/j.issn.1001-1560.2022.0258

材料保护 >

2022 , Vol. 55 >Issue 9: 134 - 140

DOI: https://doi.org/10.16577/j.issn.1001-1560.2022.0258

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含Nb氮化物硬质膜的研究现状及展望

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(沈阳大学机械工程学院辽宁省多组硬质膜研究及应用重点实验室，辽宁沈阳 110044)

张钧(1966-)，博士，教授，研究生导师，主要研究方向为材料表面改性，电话：024-62268153，E - mail: zhjun88@126.com

收稿日期: 2022-03-21

修回日期: 2022-04-19

录用日期: 2022-05-25

网络出版日期: 2023-12-23

基金资助

辽宁省科技厅博士启动计划项目(2021 - BS - 276)资助

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Research Status and Prospect of Nb - Containing Nitride Hard Film

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(Key Laboratory of Research and Application of Multiple Hard Films, College of Mechanical Engineering, Shenyang University, Shenyang 110044, China)

Received date: 2022-03-21

Revised date: 2022-04-19

Accepted date: 2022-05-25

Online published: 2023-12-23

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摘要

针对现有的TiNbN硬质膜的制备技术、晶体结构、硬度、结合力、耐磨性等组织性能方面进行了分析概述。针对TiAlNbN硬质膜的硬度、耐磨性、抗热震性能等力学性能进行了总结，并对TiAlNbN硬质膜的发展进行了展望。

关键词： TiNbN硬质膜; TiAlNbN硬质膜; 硬度; 耐磨性

本文引用格式

苏富斌, 张钧, 王晓阳, 钱春晖, 陈磊 . 含Nb氮化物硬质膜的研究现状及展望[J]. 材料保护, 2022 , 55(9) : 134 -140 . DOI: 10.16577/j.issn.1001-1560.2022.0258

Abstract

The preparation technology and microstructure properties like crystal structure, hardness, adhesion and wear resistance of the existing TiNbN hard films were analyzed and overviewed in this paper. Besides, the mechanical properties such as hardness, wear resistance and thermal shock resistance of TiAlNbN hard films were summarized. Finally, the development of TiAlNbN hard film was prospected.

Key words： TiNbN hard film; TiAlNbN hard film; hardness; wear resistance

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