Ag掺杂对CrN薄膜结构、摩擦学性能和腐蚀性能的影响

蒋成燕, 贾金龙, 胡春霞, 冯毅, 刘建新

doi:10.16577/j.issn.1001-1560.2022.0308

材料保护 >

2022 , Vol. 55 >Issue 11: 56 - 62

DOI: https://doi.org/10.16577/j.issn.1001-1560.2022.0308

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Ag掺杂对CrN薄膜结构、摩擦学性能和腐蚀性能的影响

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兰州工业学院材料工程学院

蒋成燕(1986-)，硕士，讲师，主要从事材料表面改性的研究，E - mail: jcy19861127@163.com

收稿日期: 2022-05-24

修回日期: 2022-06-28

录用日期: 2022-07-28

网络出版日期: 2023-12-25

基金资助

甘肃省高等学校创新基金项目[2021A - 160]资助

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Influence of Ag Doping on the Structue, Tribological and Corrosion Properties of CrN Film

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(Department of Materials Engineering, Lanzhou Institute of Technology, Lanzhou 730050, China)

Received date: 2022-05-24

Revised date: 2022-06-28

Accepted date: 2022-07-28

Online published: 2023-12-25

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摘要

为明确Ag含量对CrN - Ag纳米复合薄膜组织、摩擦学性能和耐腐蚀性能的影响规律，利用多靶反应磁控溅射技术制备CrN及CrN掺Ag纳米复合薄膜，并采用扫描电子显微镜结合能谱仪(SEM - EDS)、X射线衍射仪(XRD)，球 - 盘摩擦试验机和电化学工作站对2种薄膜的微观组织、摩擦学行为和电化学腐蚀行为进行表征。结果表明：少量Ag元素(9.19%，原子分数，下同)的添加可以提高CrN - Ag纳米复合薄膜的致密度，而过量Ag元素的掺杂(29.58%)则会造成薄膜结构疏松，且引起Ag颗粒在表面富集。复合薄膜的摩擦系数随着Ag含量的增加而降低，高Ag含量(29.58%)薄膜的摩擦系数在摩擦时间为100 s内时低至0.40，而磨损率则随着Ag含量的增加表现出先降低后升高的趋势。CrN - Ag(L)复合薄膜的磨损率低至2.25×10-6 mm3/(N·m)，相比于未添加Ag的CrN薄膜，磨损率下降了64.9%。由电化学分析可知，低含量的Ag可增强CrN - Ag(L)复合薄膜的耐腐蚀性能，而过量的Ag则会造成CrN - Ag(H)薄膜耐腐蚀性的显著下降。

关键词： CrN - Ag纳米复合薄膜; 微观结构; 摩擦学性能; 腐蚀性能

本文引用格式

蒋成燕, 贾金龙, 胡春霞, 冯毅, 刘建新 . Ag掺杂对CrN薄膜结构、摩擦学性能和腐蚀性能的影响[J]. 材料保护, 2022 , 55(11) : 56 -62 . DOI: 10.16577/j.issn.1001-1560.2022.0308

Abstract

In order to clarify the influencing rule of Ag content on the structure, tribological and anti - corrosion properties of CrN - Ag nanocomposite film, CrN film and Ag - doped CrN nanocomposite film were prepared by multi - target reactive magnetron sputtering technology. The microstructure, tribological behavior and corrosion behavior of the two films were characterized by scanning electron microscopy combined with energy dispersive spectroscopy (SEM - EDS), X - ray diffractometer (XRD), sphere - disc friction testing machine and electrochemical workstation. Results showed that a small amount of Ag (9.19%, atom fraction, the same below) could improve the density of CrN - Ag nanocomposite film, while excessive Ag (29.58%) would result in a loose film structure and the enrichment of Ag particles on the surface. The friction coefficient of the composite films decreased with the increase of Ag content, and the friction coefficient of the film with high Ag content (29.58%) was as low as 0.4 when the friction time was within 100 s, while the wear rate decreased first and then increased with the increase of Ag content. The wear rate of CrN - Ag(L) composite film was as low as 2.25×10-6 mm3/(N·m), which was 64.9% lower than that of the Ag - free CrN film. Electrochemical analysis showed that low Ag content had a positive effect on the corrosion resistance of CrN - Ag(L) film, while the excess Ag content significantly decreased the corrosion resistance of CrN - Ag(H) film.

Key words： CrN - Ag nanocomposite film; microstructure; tribological properties; corrosion properties

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