氮氩比对多弧离子镀TiAlSiN薄膜形貌和性能的影响

覃群, 吴浩龙, 王天国

doi:10.16577/j.issn.1001-1560.2023.0091

材料保护 >

2023 , Vol. 56 >Issue 4: 110 - 115

DOI: https://doi.org/10.16577/j.issn.1001-1560.2023.0091

工艺探讨

氮氩比对多弧离子镀TiAlSiN薄膜形貌和性能的影响

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¹湖北汽车工业学院材料科学与工程学院； ²东风汽车底盘系统有限公司

覃群(1981-)，硕士，副教授，研究方向为多弧离子镀硬质薄膜技术，电话:0719-8238783，E-mail: qinqun0806＠163.com

收稿日期: 2022-10-27

修回日期: 2022-11-25

录用日期: 2022-12-13

网络出版日期: 2023-08-04

基金资助

湖北省教育厅科学技术项目(Q20181802)；湖北省市场监督管理局科技计划项目(Hbscjg-kj201906) 资助

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Effect of Nitrogen / Argon Ratio on Microstructure and Properties of TiAlSiN Film Prepared by Multi-Arc Ion Plating

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(1.School of Materials Science and Engineering，Hubei University of Automotive Technology，Shiyan 442002，China；2.Dongfeng Automobile Chassis System Co.，Ltd.，Shiyan 442002，China)

Received date: 2022-10-27

Revised date: 2022-11-25

Accepted date: 2022-12-13

Online published: 2023-08-04

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摘要

为了改善模具钢表面质量，采用多弧离子镀技术在H13 模具钢表面沉积TiAlSiN 薄膜，采用扫描电镜(SEM) 、X 射线衍射(XRD) 等方法研究了不同氮氩比对薄膜表面形貌、硬度、结合力、耐腐蚀性能和抗氧化性的影响。结果表明:当氮氩比为8 ∶2 时，薄膜表面颗粒堆积较少，光滑平整，致密性好，此时薄膜膜基结合力达到最大值20.4 N。随着氮氩比的升高，样品经过高温氧化后，增重百分比呈下降趋势，当氮氩比为8 ∶2 时，增重百分比最低，具有最佳的高温抗氧化性能；并且此时薄膜的自腐蚀电流密度达到最小，为3.147×10-5A/cm2，薄膜的耐腐蚀性能最优。

关键词： 氮氩比; TiAlSiN 薄膜; 多弧离子镀; 耐腐蚀性; 抗氧化性能

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覃群, 吴浩龙, 王天国 . 氮氩比对多弧离子镀TiAlSiN薄膜形貌和性能的影响[J]. 材料保护, 2023 , 56(4) : 110 -115 . DOI: 10.16577/j.issn.1001-1560.2023.0091

Abstract

In order to improve the surface quality of die steel，TiAlSiN films were deposited on the surface of H13 die steel by multi-arc ion plating technology，and the effects of different nitrogen / argon ratios on the surface morphology，hardness，adhesion，corrosion resistance and oxidation resistance of the film were studied by means of scanning electron microscope，X-ray diffraction (XRD) and other methods.Results showed that when the ratio of nitrogen to argon was 8 ∶2，the film had less particle accumulation on the surface，the surface was smooth with high density，the bonding force between the film and the substrate also reached the maximum value of 20.4 N.With the increase of nitrogenargon ratio，the weight gain percentage of the sample after high-temperature oxidation showed a downward trend.When the nitrogen-argon ratio was 8 ∶2，the weight gain percentage was the lowest，and the sample had the best high-temperature oxidation resistance.And under this condition，the self-corrosion current density of the film reached the minimum value of 3.147×10-5A/cm2，and the corrosion resistance of the film was the best.

Key words： N2/Ar ratio; TiAlSiN film; multi-arc ion plating; corrosion resistance; oxidation resistance

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