基体偏压幅值对NiCrN 薄膜微观结构及力学性能的影响
收稿日期: 2024-04-13
修回日期: 2024-05-05
录用日期: 2024-05-25
网络出版日期: 2025-01-14
Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films
Received date: 2024-04-13
Revised date: 2024-05-05
Accepted date: 2024-05-25
Online published: 2025-01-14
赵彦辉, 赵鑫, 宋贵宏 . 基体偏压幅值对NiCrN 薄膜微观结构及力学性能的影响[J]. 材料保护, 2024 , 57(12) : 122 -130 . DOI: 10.16577/j.issn.1001-1560.2024.0277
Key words: arc ion plating; NiCrN thin film; microstructure; mechanical property
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