为了探究高功率脉冲磁控溅射制备TiN和TiAlSiN纳米涂层的腐蚀磨损性能和磨损机理，采用高功率脉冲磁控溅射技术在AISI 304不锈钢基体表面沉积了TiN及TiAlSiN涂层。采用X射线衍射仪对涂层相结构进行分析；采用纳米压痕仪测试涂层的纳米硬度和杨氏模量；采用微米划痕仪测试2种涂层的结合力；采用电化学原位腐蚀磨损仪研究了涂层在空气介质和在NaCl水溶液中的腐蚀磨损性能。结果表明：2种涂层具有相似的面心立方结构特征，表面结构光滑致密。TiN涂层硬度为19.3 GPa, TiAlSiN涂层硬度增至38.1 GPa。TiAlSiN涂层的划痕结合强度失效临界载荷为27 N,是TiN涂层的2倍多，划痕形貌光滑，并且未发生剥落失效。在相同的磨损条件下，TiN涂层发生严重剥落并导致摩擦系数波动，磨损机制为严重的磨粒磨损。TiAlSiN涂层磨痕呈现细小犁沟，磨损机制为磨粒磨损和氧化磨损的复合机制。此外，TiAlSiN涂层表现出比TiN涂层更强的水润滑性能，摩擦系数为0.1,开路电位为-0.088 V。综上，TiAlSiN涂层相较于TiN涂层显示出更高的硬度和韧性，提高了对抗裂纹萌生和扩展的能力，同时表现出优异的耐腐蚀磨损性能。

In order to investigate the corrosion and wear performance and wear mechanisms of TiN and TiAlSiN nanocoatings prepared by high-power pulsed magnetron sputtering, TiN and TiAlSiN coatings were deposited on AISI 304 stainless steel substrates using high-power pulsed magnetron sputtering technology. The phase structure of the coatings was analyzed using X-ray diffraction(XRD). The nanohardness and Young's modulus of the coatings were measured using a nanoindentation instrument, and the adhesion strength of the two coatings was evaluated using a micro-scratch tester. The corrosion and wear performance of the coatings in air and in NaCl solution were studied using an electrochemical in-situ corrosion wear instrument. Results showed that both two coatings exhibited similar face-centered cubic(FCC) structures with smooth and dense surfaces. The hardness of the TiN coating was 19.3 GPa, while the hardness of the TiAlSiN coating increased to 38.1 GPa. The critical load for failure of the TiAlSiN coating's scratch adhesion strength was 27 N, more than twice that of the TiN coating, and the scratch morphology was smooth without spallation failure. Under the same wear conditions, the TiN coating suffered severe spallation, leading to fluctuations in the coefficient of friction, with the wear mechanism dominated by severe abrasive wear. The wear tracks of the TiAlSiN coating displayed fine plowing grooves, and the wear mechanism was a combination of abrasive wear and oxidative wear. Furthermore, the TiAlSiN coating exhibited stronger water-lubrication performance than the TiN coating, with a friction coefficient of 0.1 and an open circuit potential of-0.088 V. In conclusion, the TiAlSiN coating demonstrated higher hardness and toughness compared to the TiN coating, enhancing its ability to resist crack initiation and propagation, while showing excellent corrosion and wear resistance.