计算流体力学(CFD)在化学气相沉积(CVD)模拟仿真中的应用
张博闻, 吴勇, 杨甫, 夏思瑶, 黄天纵, 孟施旭
Application of Computational Fluid Dynamics in Chemical Vapor Deposition Simulation
ZHANG Bowen, WU Yong, YANG Fu, XIA Siyao, HUANG Tianzong, MENG Shixu
材料保护
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2022, (9): 141
-147
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DOI: 10.16577/j.issn.1001-1560.2022.0259
