不同负偏压下多弧离子镀TiAlN薄膜的微观结构与耐腐蚀性研究
赵磊, 梁启超, 刘传龙, 王天国
Study on Microstructure and Corrosion Resistance of TiAlN Films Deposited by Multi - Arc Ion Plating under Different Negative Bias Voltages
ZHAO Lei, LIANG Qichao, LIU Chuanlong, WANG Tianguo
材料保护
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2022, (10): 118
-122
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DOI: 10.16577/j.issn.1001-1560.2022.0285
