磁控溅射CrAlSiN膜层的高温性能研究
何月漫, 刘展硕, 柳 泉, 刘 贺, 杜晓明, 张 罡
Study on High Temperature Performance of Magnetron Sputtered CrAlSiN Film
HE Yue-man, LIU Zhan-shuo, LIU Quan, LIU He, DU Xiao-ming, ZHANG Gang
材料保护
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2023, (1): 16
-21
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DOI: 10.16577/j.issn.1001-1560.2023.0003
