镶嵌靶磁控溅射Cu-W薄膜的结构与力学性能
郭中正, 闫万珺, 张殿喜, 杨秀凡, 蒋宪邦, 周丹彤
Structures and Mechanical Properties of Cu-W Thin Films Deposited by Mosaic Target Magnetron Sputtering
GUO Zhongzheng, YAN Wanjun, ZHANG Dianxi, YANG Xiufan, JIANG Xianbang, ZHOU Dantong
材料保护
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2024, (3): 166
-174
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DOI: 10.16577/j.issn.1001-1560.2024.0069
