高功率脉冲磁控溅射技术制备ta-C膜及性能改性研究
冯利民, 史敬伟, 何哲秋, 李建中, 石俊杰
Preparation of ta-C Film by High-Power Impulse Magnetron Sputtering Technology and Its Performance Modification
FENG Limin, SHI Jingwei, HE Zheqiu, LI Jianzhong, SHI Junjie
材料保护
.
2024, (7): 23
-29
.
DOI: 10.16577/j.issn.1001-1560.2024.0147
