偏压对HiPIMS制备TiAlSiN涂层结构与性能的影响
杜建融, 陶冠羽, 陈辉, 易娟, 万洪, 刘书洋, 张钰
Influence of Bias Voltage on Microstructure and Properties of TiAlSiN Coatings Prepared by HiPIMS
DU Jianrong, TAO Guanyu, CHEN Hui, YI Juan, WAN Hong, LIU Shuyang, ZHANG Yu
材料保护
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2024, (7): 30
-42
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DOI: 10.16577/j.issn.1001-1560.2024.0148
