CVD法制备SiC涂层的工艺影响分析
陈良财, 尹翔, 王青春, 龙连春
Analysis of the Process Influences on the Preparation of SiC Coatings by Chemical Vapor Deposition
CHEN Liangcai, YIN Xiang, WANG Qingchun, LONG Lianchun
材料保护
.
2024, (11): 110
-117
.
DOI: 10.16577/j.issn.1001-1560.2024.0255
