工艺参数对磁控溅射制备Ag涂层微观性能的影响研究
黄鑫宇, 戎文娟, 黄永玲, 王佳琳
Study on the Effects of Process Parameters on the Micro Properties of Ag Coatings Prepared by Magnetron Sputtering
HUANG Xinyu, RONG Wenjuan, HUANG Yongling, WANG Jialin
材料保护
.
2024, (11): 147
-155
.
DOI: 10.16577/j.issn.1001-1560.2024.0259
