氮氩比对多弧离子镀TiAlSiN薄膜形貌和性能的影响
覃群, 吴浩龙, 王天国
Effect of Nitrogen / Argon Ratio on Microstructure and Properties of TiAlSiN Film Prepared by Multi-Arc Ion Plating
TAN Qun, WU Haolong, WANG Tianguo
材料保护
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2023, (4): 110
-115
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DOI: 10.16577/j.issn.1001-1560.2023.0091
