基体偏压幅值对NiCrN 薄膜微观结构及力学性能的影响
赵彦辉, 赵鑫, 宋贵宏
Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films
ZHAO Yanhui, ZHAO Xin, SONG Guihong
材料保护
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2024, (12): 122
-130
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DOI: 10.16577/j.issn.1001-1560.2024.0277
