Effects of Doping Cr and Cr-Ni on the Properties of TiAlN Thin Films under Different Bias Voltage

doi:10.16577/j.cnki.42-1215/tb.2021.02.013

LIANG Wei-zhong, WANG Cheng-lei, ZHANG Ke-xiang, LIANG Chao-jie, XIE Ying-guang, LIN De-min

Materials Protection ›› 2021, Vol. 54 ›› Issue (2) : 76-80.

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Materials Protection ›› 2021, Vol. 54 ›› Issue (2) : 76-80. DOI: 10.16577/j.cnki.42-1215/tb.2021.02.013

Effects of Doping Cr and Cr-Ni on the Properties of TiAlN Thin Films under Different Bias Voltage

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 54(2): 76-80 https://doi.org/10.16577/j.cnki.42-1215/tb.2021.02.013

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