Effects of N/Ti Atomic Ratio on Microstructure and Properties of TiN Films

doi:10.16577/j.cnki.42-1215/tb.2021.04.024

PENG Li - jing, ZHANG Jun, XU Chen - ning, WANG Xiao - yang, WANG Mei - han

Materials Protection ›› 2021, Vol. 54 ›› Issue (4) : 127-132.

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Materials Protection ›› 2021, Vol. 54 ›› Issue (4) : 127-132. DOI: 10.16577/j.cnki.42-1215/tb.2021.04.024

Effects of N/Ti Atomic Ratio on Microstructure and Properties of TiN Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 54(4): 127-132 https://doi.org/10.16577/j.cnki.42-1215/tb.2021.04.024

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