Research Status and Prospect of Nb - Containing Nitride Hard Film

doi:10.16577/j.issn.1001-1560.2022.0258

SU Fubin, ZHANG Jun, WANG Xiaoyang, QIAN Chunhui, CHEN Lei

Materials Protection ›› 2022, Vol. 55 ›› Issue (9) : 134-140.

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Materials Protection ›› 2022, Vol. 55 ›› Issue (9) : 134-140. DOI: 10.16577/j.issn.1001-1560.2022.0258

Research Status and Prospect of Nb - Containing Nitride Hard Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 55(9): 134-140 https://doi.org/10.16577/j.issn.1001-1560.2022.0258

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