Study on High Temperature Performance of Magnetron Sputtered CrAlSiN Film

doi:10.16577/j.issn.1001-1560.2023.0003

HE Yue-man, LIU Zhan-shuo, LIU Quan, LIU He, DU Xiao-ming, ZHANG Gang

Materials Protection ›› 2023, Vol. 56 ›› Issue (1) : 16-21.

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Materials Protection ›› 2023, Vol. 56 ›› Issue (1) : 16-21. DOI: 10.16577/j.issn.1001-1560.2023.0003

Study on High Temperature Performance of Magnetron Sputtered CrAlSiN Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 56(1): 16-21 https://doi.org/10.16577/j.issn.1001-1560.2023.0003

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