Effect of Nitrogen / Argon Ratio on Microstructure and Properties of TiAlSiN Film Prepared by Multi-Arc Ion Plating

doi:10.16577/j.issn.1001-1560.2023.0091

TAN Qun, WU Haolong, WANG Tianguo

Materials Protection ›› 2023, Vol. 56 ›› Issue (4) : 110-115.

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Materials Protection ›› 2023, Vol. 56 ›› Issue (4) : 110-115. DOI: 10.16577/j.issn.1001-1560.2023.0091

Effect of Nitrogen / Argon Ratio on Microstructure and Properties of TiAlSiN Film Prepared by Multi-Arc Ion Plating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 56(4): 110-115 https://doi.org/10.16577/j.issn.1001-1560.2023.0091

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