Structures and Mechanical Properties of Cu-W Thin Films Deposited by Mosaic Target Magnetron Sputtering

doi:10.16577/j.issn.1001-1560.2024.0069

GUO Zhongzheng, YAN Wanjun, ZHANG Dianxi, YANG Xiufan, JIANG Xianbang, ZHOU Dantong

Materials Protection ›› 2024, Vol. 57 ›› Issue (3) : 166-174.

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Materials Protection ›› 2024, Vol. 57 ›› Issue (3) : 166-174. DOI: 10.16577/j.issn.1001-1560.2024.0069

Structures and Mechanical Properties of Cu-W Thin Films Deposited by Mosaic Target Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 57(3): 166-174 https://doi.org/10.16577/j.issn.1001-1560.2024.0069

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