Effects of Pulsed Arc Ion Plating Process Parameters on Structure and Resistance of Zinc Oxide Piezoelectric Coating

doi:10.16577/j.issn.1001-1560.2024.0114

BU Tianlong, JIA Jie, LI Di, ZHANG Dapei, KOU Hanpeng, LI Wenzhu, DENG Jiangang, LAN Zhenbo, XU Zhuolin

Materials Protection ›› 2024, Vol. 57 ›› Issue (5) : 158-164.

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Materials Protection ›› 2024, Vol. 57 ›› Issue (5) : 158-164. DOI: 10.16577/j.issn.1001-1560.2024.0114

Effects of Pulsed Arc Ion Plating Process Parameters on Structure and Resistance of Zinc Oxide Piezoelectric Coating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 57(5): 158-164 https://doi.org/10.16577/j.issn.1001-1560.2024.0114

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