Influence of Bias Voltage on Microstructure and Properties of TiAlSiN Coatings Prepared by HiPIMS

doi:10.16577/j.issn.1001-1560.2024.0148

DU Jianrong, TAO Guanyu, CHEN Hui, YI Juan, WAN Hong, LIU Shuyang, ZHANG Yu

Materials Protection ›› 2024, Vol. 57 ›› Issue (7) : 30-42.

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Materials Protection ›› 2024, Vol. 57 ›› Issue (7) : 30-42. DOI: 10.16577/j.issn.1001-1560.2024.0148

Influence of Bias Voltage on Microstructure and Properties of TiAlSiN Coatings Prepared by HiPIMS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 57(7): 30-42 https://doi.org/10.16577/j.issn.1001-1560.2024.0148

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