Analysis of the Process Influences on the Preparation of SiC Coatings by Chemical Vapor Deposition

CHEN Liangcai, YIN Xiang, WANG Qingchun, LONG Lianchun

Materials Protection ›› 2024, Vol. 57 ›› Issue (11) : 110-117.

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Materials Protection ›› 2024, Vol. 57 ›› Issue (11) : 110-117. DOI: 10.16577/j.issn.1001-1560.2024.0255

Analysis of the Process Influences on the Preparation of SiC Coatings by Chemical Vapor Deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 57(11): 110-117 https://doi.org/10.16577/j.issn.1001-1560.2024.0255

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