Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films

doi:10.16577/j.issn.1001-1560.2024.0277

ZHAO Yanhui, ZHAO Xin, SONG Guihong

Materials Protection ›› 2024, Vol. 57 ›› Issue (12) : 122-130.

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Materials Protection ›› 2024, Vol. 57 ›› Issue (12) : 122-130. DOI: 10.16577/j.issn.1001-1560.2024.0277

Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 57(12): 122-130 https://doi.org/10.16577/j.issn.1001-1560.2024.0277

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