Process Optimization of Plasma Etching on the Size Reduction of Polystyrene Microspheres

SUN Shiyang, HUANG Shengbao, QIAN Yuanjin, LIU Dongkun, LI Jiabin, REN Yuan, ZHANG Wenxing

Materials Protection ›› 2025, Vol. 58 ›› Issue (7) : 58-65.

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Materials Protection ›› 2025, Vol. 58 ›› Issue (7) : 58-65. DOI: 10.16577/j.issn.1001-1560.2025.0114

Process Optimization of Plasma Etching on the Size Reduction of Polystyrene Microspheres

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 58(7): 58-65 https://doi.org/10.16577/j.issn.1001-1560.2025.0114

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