Research on the Improvement of Wear Resistance of Si3N4 Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures

doi:10.16577/j.issn.1001-1560.2025.0117

Research on the Improvement of Wear Resistance of Si₃N₄ Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures

WANG He, CHEN Sibo, YAN Guangyu, WU Yuhou, CHU Jianxiang, DAI Guangyuan

Materials Protection ›› 2025, Vol. 58 ›› Issue (7) : 85-95.

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Materials Protection ›› 2025, Vol. 58 ›› Issue (7) : 85-95. DOI: 10.16577/j.issn.1001-1560.2025.0117

Research on the Improvement of Wear Resistance of Si₃N₄ Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 58(7): 85-95 https://doi.org/10.16577/j.issn.1001-1560.2025.0117

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