Study on the Preparation and Tribological Properties of TiC Thin Films on Si3N4 Substrates

doi:10.16577/j.issn.1001-1560.2025.0142

Study on the Preparation and Tribological Properties of TiC Thin Films on Si₃N₄ Substrates

WANG He, CHU Jianxiang, YAN Guangyu, WU Yuhou, CHEN Sibo, DAI Guangyuan

Materials Protection ›› 2025, Vol. 58 ›› Issue (8) : 147-154.

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Materials Protection ›› 2025, Vol. 58 ›› Issue (8) : 147-154. DOI: 10.16577/j.issn.1001-1560.2025.0142

Study on the Preparation and Tribological Properties of TiC Thin Films on Si₃N₄ Substrates

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 58(8): 147-154 https://doi.org/10.16577/j.issn.1001-1560.2025.0142

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