The Effect of Methane Flow Rate on the Structure and Low-Vacuum Tribological Properties of Diamond-Like Carbon Composite Films

doi:10.16577/j.issn.1001-1560.2025.0151

WANG Zhanzhuo, LI Hongxuan

Materials Protection ›› 2025, Vol. 58 ›› Issue (9) : 68-80.

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Materials Protection ›› 2025, Vol. 58 ›› Issue (9) : 68-80. DOI: 10.16577/j.issn.1001-1560.2025.0151

The Effect of Methane Flow Rate on the Structure and Low-Vacuum Tribological Properties of Diamond-Like Carbon Composite Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 58(9): 68-80 https://doi.org/10.16577/j.issn.1001-1560.2025.0151

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