Effect of Bias Voltage on the Structure and Properties of AlTiSiN Coatings Deposited via High-Power Pulse Magnetron Sputtering

doi:10.16577/j.issn.1001-1560.2025.0186

ZHAO Xinjie, HE Lei, XU Yi, XIA Yuan, LI Guodong

Materials Protection ›› 2025, Vol. 58 ›› Issue (11) : 28-35.

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Materials Protection ›› 2025, Vol. 58 ›› Issue (11) : 28-35. DOI: 10.16577/j.issn.1001-1560.2025.0186

Effect of Bias Voltage on the Structure and Properties of AlTiSiN Coatings Deposited via High-Power Pulse Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 58(11): 28-35 https://doi.org/10.16577/j.issn.1001-1560.2025.0186

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