PDF(36206 KB)
Effect of α-SiHX Interlayer Deposition Voltage on the Properties of Multilayer Si-DLC Films on the Inner Wall of Titanium Alloy Tubes
YAO Hailiang, LI Yongchun, LIU Zhengyu, WANG Yunfeng, CHEN Lin, ZHANG Guang’ an
Materials Protection ›› 2026, Vol. 59 ›› Issue (8) : 60-71.
PDF(36206 KB)
PDF(36206 KB)
Effect of α-SiHX Interlayer Deposition Voltage on the Properties of Multilayer Si-DLC Films on the Inner Wall of Titanium Alloy Tubes
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