PDF(17612 KB)
Control Effects and Optimization of Ion Source Power in HiPIMS Deposition of Alumina Thin Films
LIU Yaoyao, YANG Dongjie, CHEN Lingjie, CUI Suihan, LIU Liangliang, Wu Zhongzhen
Materials Protection ›› 2026, Vol. 59 ›› Issue (9) : 99-106.
PDF(17612 KB)
PDF(17612 KB)
Control Effects and Optimization of Ion Source Power in HiPIMS Deposition of Alumina Thin Films
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