Optimization of Surface Quality of CrAlN Coatings Fabricated Using Cathode Multi-Arc Ion Plating
Received date: 2022-09-05
Revised date: 2022-10-15
Accepted date: 2022-11-04
Online published: 2023-03-15
LIAN Xin-yu, WANG Xin, NIE Gao-sheng, HU Peng, SUO Xin-kun . Optimization of Surface Quality of CrAlN Coatings Fabricated Using Cathode Multi-Arc Ion Plating[J]. Materials Protection, 2023 , 56(3) : 57 -64 . DOI: 10.16577/j.issn.1001-1560.2023.0060
[1] CHAYEUSKI V,ZHYLINSKI V,CERNASHEJUS O,et al.Structural and Mechanical Properties of the ZrC/Ni-Nanodiamond Coating Synthesized by the PVD and Electroplating Processes for the Cutting Knifes[J].Journal of Materials Engineering and Performance,2019,28(3):1 278-1 285.
[2] WOJCIECHOWSKI S,TWARDOWSKI P.Tool life and process dynamics in high speed ball end milling of hardened steel[J].Procedia CIRP,2012,1(1): 289-294.
[3] KNOTEK O,Löffler F,Krämer G.Substrate and interfacerelated influences on the performance of arc - physical -vapour-deposition-coated cemented carbides in interruptedcut machining[M]/ /Metallurgical Coatings and Thin Films.Amsterdam:Elsevier,1992: 476-481.
[4] TKADLETZ M,MITTERER C,SARTORY B,et al.The effect of droplets in arc evaporated TiAlTaN hard coatings on the wear behavior[J].Surface and Coatings Technology,2014,257: 95-101.
[5] BEMPORAD E,SEBASTIANI M,DEFELICIS D,et al.Focused ion beam and transmission electron microscopy as a powerful tool to understand localized corrosion phenomena[J].Corrosion Reviews,2011,29(5/6): 229-239.
[6] PANJAN P,CˇEKADA M,PANJAN M,et al.Growth defects in PVD hard coatings[J].Vacuum,2009,84(1):209-214.
[7] SEBASTIANI M,PICCOLI M,BEMPORAD E.Effect of micro-droplets on the local residual stress field in CAE-PVD thin coatings[J].Surface and Coatings Technology,2013,215: 407-412.
[8] BOXMAN R L,GOLDSMITH S,GREENWOOD A.Twenty-Five Years of Progress in Vacuum Arc Research and Utilization[J].IEEE Transactions on Plasma Science,1997,25(6):1 174-1 186.
[9] ALI M,HAMZAH E,ABBAS T,et al.Microdroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films[J].Surface Review & Letters,2008,15(5):653-659.
[10] ZHIRKOV I,PETRUHINS A,ROSEN J.Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti-Al compound cathodes[J].Surface and Coatings Technology,2015,281: 20-26.
[11] BOXMAN R L,GOLDSMITH S.Macroparticle contamination in cathodic arc coatings: generation,transport and control[J].Surface and Coatings Technology,1992,52(1):39-50.
[12] ZHIRKOV I,PETRUHINS A,POLCIK P,et al.Generation of super-size macroparticles in a direct current vacuum arc discharge from a Mo-Cu cathode[J].Applied Physics Letters,2016,108(5) :054103
[13] BIZYUKOV A A,GIRKA I O,ROMASHCHENKO E V.Transport of a macroparticle in vacuum arc sheath[J].IEEE Transactions on Plasma Science,2016,44(7): 1 050-1 055.
[14] WANG H Q,HENG J,LU W Q,et al.Analyses of test glass edge - effect on coatings monitoring: Proceedings of SPIE - The International Society for Optical Engineering[C].Beijing: International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design,Manufacturing,and Testing,2008: 662419.
[15] 莫继良,朱旻昊,安 剑,等.物理气相沉积CrN 涂层的研究进展:第六届全国表面工程学术会议暨首届青年表面工程学术论坛论文集[C].兰州:中国机械工程学会,2006.MO J L,ZHU M H,AN J,et al.Research Progress of Physical Vapor Deposition of CrN Coating:Proceedings of the 6th National Surface Engineering Academic Conference and the 1st Youth Surface Engineering Academic Forum[C].Lanzhou: Chinese Mechanical Engineering Society,2006.
[16] 王晓峰,赵瑞山,任 鑫.Al 靶电流对复合离子镀TiAl-CN 薄膜组织结构与性能的影响[J].材料保护,2018,51(12):6-11.WANG X F,ZHAO R S,REN X.Effect of Al Target Current on Structure and Properties of TiAlCN Films Prepared by Composite Ion Plating[J].Materials Protection,2018,51(12): 6-11.
[17] KATO K,BAI M,UMEHARA N,et al.Effect of internal stress of CNx coating on its wear in sliding friction[J].Surface and Coatings Technology,1999,113(3):233-241.
[18] CORREA J F,CAICEDO J C,APERADOR W A.Comparison of Structural and Electrochemical Properties among TiCN,BCN,and CrAlN Coatings under Aggressive Environments[J].Journal of Materials Engineering and Performance,2021,30(20):3 586-3 602.
[19] GARKAS W,WEISS S,WANG Q M.(Cr1-x Alx)N as a candidate for corrosion protection in high temperature segments of CCS plants[J].Environmental Earth Sciences,2013,70(8): 3 761-3 770.
[20] BOBZIN K,KALSCHEUER C,CARLET M,et al.Influence of Aluminum Content on the Impact Fatigue of HPPMS CrAlN Coatings on Tool Steel[J].Physical Mesomechanics,2021,24(5):625-632.
[21] GILEWICZ A,JDRZEJEWSKI R,PIOTR M,et al.Structure,morphology and mechanical properties of AlCrN coatings obtained by the method of cathodic arc evaporation[J].Inz·ynieria Powierzchni,2018,23(2):61-69.
/
〈 |
|
〉 |