Received date: 2023-06-10
Revised date: 2023-07-12
Accepted date: 2023-08-12
Online published: 2023-09-15
Key words： hard coating; multicomponent TiN coating; PVD; CVD
WU Yong, YANG Hanzhe, SUN Qingyun, CHEN Hui, XIA Siyao . Research Progress of TiCN, TiAlN and TiAlCN Coatings[J]. Materials Protection, 2023 , 56(9) : 1 -10 . DOI: 10.16577/j.issn.1001-1560.2023.0206
[1] BARSHILIA H C， PRAKASH M S， JAIN A， et al.Structure， hardness and thermal stability of TiAlN and nanolayered TiAlN/CrN multilayer films[J].Vacuum， 2005， 77(2):169－179.
[2] HASSINE M B，Andrén H， IYER A H S， et al.Growth model for high-Al containing CVD TiAlN coatings on cemented carbides using intermediate layers of TiN[J].Surface and Coatings Technology， 2021， 421:127361.
[3] AJIKUMAR P K， KAMRUDDIN M， RAVINDRAN T R，et al.Oxidation behavior of TiCxN1－x coatings as a function of C/N ratio[J].Ceramics International， 2014， 40(7):10 523－10 529.
[4] 黄 珂.TiN 涂层和TiAlN 涂层结合强度及抗氧化性能的研究[D].长沙:中南大学， 2015.HUANG K.Study on the bond strength and antioxidant properties of TiN coating and TiAlN coating [D].Changsha:Central South University， 2015.
[5] CHEN S N， ZHAO Y M， ZHANG Y F， et al.Influence of carbon content on the structure and tribocorrosion properties of TiAlCN/TiAlN/TiAl multilayer composite coatings[J].Surface and Coatings Technology， 2021， 411:126886.
[6] SHAN L， WANG Y， LI J， et al.Tribological behaviours of PVD TiN and TiCN coatings in artificial seawater[J].Surface and Coatings Technology， 2013， 226:40－50.
[7] SAOULA N，MADAOUI N， TADJINE R， et al.Influence of substrate bias on the structure and properties of TiCN films deposited by radio-frequency magnetron sputtering[J].Thin Solid Films， 2016， 616:521－529.
[8] Mondragón-Rodríguez G C， CHIPATECUA-GODOY Y，CAMACHO N， et al.Effect of thermal treatments in high purity Ar on the oxidation and tribological behavior of arc-PVD c - Al0.66 Ti0.33 N coatings[J].Surface and Coatings Technology， 2019， 362:44－56.
[9] WANG L， WANG M， CHEN H.Corrosion mechanism investigation of TiAlN/CrN superlattice coating by multi-arc ion plating in 3.5 wt%NaCl solution[J].Surface and Coatings Technology， 2020， 391(6):125660.
[10] QIU R， BCKE O， STIENS D， et al.CVD TiAlN coatings with tunable nanolamella architectures [J].Surface and Coatings Technology， 2021， 413: 127076.
[11] ZENG Y， QIU Y， MAO X， et al.Superhard TiAlCN coatings prepared by radio frequency magnetron sputtering[J].Thin Solid Films， 2015， 584:283－288.
[12] CHOE H J， KWON S H， LEE J J.Tribological properties and thermal stability of TiAlCN coatings deposited by ICPassisted sputtering[J].Surface and Coatings Technology，2013， 228:282－285.
[13] RASHIDI M，TAMIZIFAR M，BOUTORABI S M A.Characteristics of TiAlCN ceramic coatings prepared via pulsed-DC PACVD， part I: Influence of precursors’ ratio[J].Ceramics International， 2020，46(2):1 269－1 280.
[14] VALOUR A， HIGUITA M A U， GUILLONNEAU G， et al.Optical， electrical and mechanical properties of TiN thin film obtained from a TiO2 sol-gel coating and rapid thermal nitridation[J].Surface and Coatings Technology， 2021，413:127089.
[15] 夏俊豪.硬质合金刀具涂层的微结构研究[D].沈阳:东北大学， 2019.XIA J H.Study on microstructure of carbide tool coating[D].Shenyang:Northeastern University， 2019.
[16] 齐文艳， 李 田， 傅思伟， 等.TiCN 涂层的制备及其性能的研究[J].陶瓷学报， 2020， 41(3):384－389.QI W Y，LI T，FU S W，et al.Study on the preparation and properties of TiCN coating[J].Journal of Ceramics， 2020，41(3):384－389.
[17] DUAN L， WU H， GUO L， et al.The effect of phase on microstructure and mechanical performance in TiAlN and TiSiN films[J].Materials Research Express， 2020， 7 (6):120938.
[18] HE Q，PAIVA J M，KOHLSCHEEN J， et al.An integrative approach to coating/carbide substrate design of CVD and PVD coated cutting tools during the machining of austenitic stainless steel[J].Ceramics International， 2020， 46(4):5 149－5 158.
[19] OMAKL O.Improved structural， mechanical， corrosion and tribocorrosion properties of Ti45Nb alloys by TiN， TiAlN monolayers， and TiAlN/TiN multilayer ceramic films[J].Ceramics International， 2021， 47(3):4 149－ 4 156.
[20] KAINZ C， SCHALK N， SARINGER C， et al.In-situ investigation of the oxidation behavior of powdered TiN， Ti (C，N) and TiC coatings grown by chemical vapor deposition[J].Surface and Coatings Technology， 2020， 406:126633.
[21] ZHU Y， QU H， LUO M， et al.Dry friction and wear properties of several hard coating combinations [J].Wear，2020， 456－457:203352.
[22] ZHAO R，REN X，WEN K，et al.Multi-arc ion plating and DC magnetron sputtering integrated technique for high-performance Al，C-co-doped δ-TiN quaternary films[J].Corrosion Science， 2021， 182:109261.
[23] ALHAFIAN M R， CHEMIN J B， FLEMING Y， et al.Comparison on the structural， mechanical andtribological properties of TiAlN coatings deposited by HiPIMS and Cathodic Arc Evaporation [J].Surface and Coatings Technology，2021，423:127529.
[24] CHANDRA N G P S，OTSUKA Y，MUTOH Y，et al.Effect of coating thickness on fatigue behavior of TiAlN coated Tialloys[J].International Journal of Fatigue， 2020， 140(1－3):105767.
[25] WANG Q， ZHOU F， GAO S， et al.Effect of counterparts on the tribological properties of TiCN coatings with low carbon concentration in water lubrication[J].Wear， 2015，328－329:356－362.
[26] LIU J， MA C， TU G， et al.Cutting performance and wear mechanism of Sialon ceramic cutting inserts with TiCN coating[J].Surface and Coatings Technology， 2016， 307:146－150.
[27] TILLMANN W， MOMENI S.Tribological development of TiCN coatings by adjusting the flowing rate of reactive gases[J].Journal of Physics and Chemistry of Solids，2016，90:45－53.
[28] HE J， ZHANG F， MI P， et al.Microstructure and wear behavior ofnano C-rich TiCN coatings fabricated by reactive plasma spraying with Ti-graphite powders[J].Surface and Coatings Technology， 2016， 305:215－222.
[29] QIU L， DU Y， WANG S， et al.Through-process modeling and experimental verification of titanium carbonitride coating prepared by moderate temperature chemical vapor deposition[J].Surface and Coatings Technology， 2019， 359:278－288.
[30] DEURA M， SATO H， YAMAGUCHI J， et al.Kinetic analysis of face-centered-cubic Ti1AlN film deposition by chemical vapor deposition[J].Materials Science and Engineering B， 2021， 264:114992.
[31] 王北川， 陈 利.Al 含量对TiAlN 涂层结构及性能的影响[J].表面技术， 2022(2):29－38.WANG B C， CHEN L.Effect of Al content on structure and properties of TiAlN coating[J].Surface Technology， 2022(2):29－38.
[32] ZALESAK J， TODT J， PITONAK R， et al.Combinatorial refinement of thin - film microstructure， properties and process conditions: iterative nanoscale search for self-assembled TiAlN nanolamellae[J].Journal of Applied Crystallography， 2016， 49(6):2 217－2 225.
[33] KECKES J， DANIEL R， MITTERER C， et al.Self-organized periodic soft-hard nanolamellae in polycrystalline TiAlN thin films[J].Thin Solid Films， 2013， 545:29－32.
[34] MOGHADDAM P V， PRAKASH B， VUORINEN E， et al.High temperature tribology of TiAlN PVD coating sliding against 316L stainless steel and carbide-free bainitic steel[J].Tribology International， 2020， 159:106847.
[35] ZHANG X， QIU Y， TAN Z， et al.Effect of Al content on structure and properties of TiAlCN coatings prepared by magnetron sputtering[J].Journal of Alloys and Compounds，2014， 617:81－85.
[36] ENDLER I， Höhn M， HERRMANN M， et al.Aluminumrich TiAlCN coatings by Low Pressure CVD[J].Surface and Coatings Technology， 2010， 205(5):1 307－1 312.
[37] 宫 名.靶材中Al 含量对TiAlCN 涂层结构和耐磨性能的影响[J].佳木斯大学学报(自然科学版)， 2022(3):103－106.GONG M.Effect of Al Content in target material on structure and wear resistance of TiAlCN coating[J].Journal of Jiamusi University(Natural Science Edition)， 2022(3): 103－106.
[38] BUCHINGER J，LFLER L，AST J，et al.Fracture properties of thin film TiN at elevated temperatures[J].Materials ＆Design， 2020， 194:108885.
[39] HOVSEPIAN P E， EHIASARIAN A P， PETROV I.Structure evolution and properties of TiAlCN/VCN coatings deposited by reactive HIPIMS[J].Surface and Coatings Technology， 2014， 257:38－47.
[40] TILLMANN W， GRISALES D， TOVAR C M， et al.Tribological behaviour of low carbon-containing TiAlCN coatings deposited by hybrid (DCMS/HiPIMS) technique[J].Tribology International， 2020， 151(21):106528.
[41] STYLIANOU R， VELIC D， DAVES W， et al.Stress relaxation through thermal crack formation in CVD TiCN coatings grown on WC-Co with different Co contents[J].International Journal of Refractory Metals and Hard Materials， 2020，86:105102.
[42] ZHANG X， JIANG J， ZENG Y，et al.Effect of carbon on TiAlCN coatings deposited by reactive magnetron sputtering[J].Surface and Coatings Technology， 2008， 203(5－7):594－597.
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