XIE Songjing, WANG Liang, YAO Jianhua . Research Progress of Numerical Simulation of Laser Polishing on Materials’ Surface[J]. Materials Protection, 2023 , 56(10) : 42 -55 . DOI: 10.16577/j.issn.1001-1560.2023.0234

[1] 俞宽新，江铁良，赵启大.激光原理与激光技术[M].北京:北京工业大学出版社，1998.YU K X， JIANG T L， ZHAO Q D.Laser principle and laser technology [M].Beijing: Beijing University of Technology Press， 1998.

[2] MCDONALD M W， GORA W S， STEVENSON S G，et al.Practical implementation of laser polishing on additively manufactured metallic components [J].Journal of Laser Applications， 2020， 32(4): 042019.

[3] OBEIDI M， MCCARTHY E， O’CONNELL B， et al.Laser polishing of additive manufactured 316L stainless steel synthesized by selective laser melting [J].Materials，2019，12(6): 991.

[4] CHIK N， ZAIN W， MOHAMAD A J， et al.Bacterial adhesion on the titanium and stainless-steel surfaces undergone two different treatment methods: polishing and ultrafast laser treatment [J].IOP Conference Series: Materials Science and Engineering， 2018， 358: 012034.

[5] LI T， GUO Y， MIZUTANI M， et al.Surface smoothing of bulk metallic glasses by femtosecond laser double-pulse irradiation [J].Surface and Coating Technology， 2021，408:126803.

[6] PRIESKE M， VOLLERTSEN F.Picosecond-laser polishing of CVD-diamond coatings without graphite formation[J].Materials Today: Proceedings， 2020， 40: 1－4.

[7] ZHANG X M， JI L F， ZHANG L T， et al.Polishing of alumina ceramic to submicrometer surface roughness by picosecond laser [J].Surface and Coatings Technology， 2020，397: 125962.

[8] 陈博文，孙树峰，王 茜，等.材料表面激光抛光技术研究进展[J].中国表面工程，2021；34(6):74－89.CHEN B W， SUN S F，WANG X， et al.Research progress of laser polishing technology for material surface [J].China Surface Engineering， 2021， 34(6): 74－89.

[9] YUNG K C， ZHANG S S， DUAN L， et al.Laser polishing of additive manufactured tool steel components using pulsed or continuous-wave lasers [J].The International Journal of Advanced Manufacturing Technology，2019，105:425－440.

[10] CHOUDHARY A， SADHU A， SARKAR S， et al.Laser surface polishing of NiCrSiBC-60WC ceramic-metal matrix composite deposited by laser directed energy deposition process [J].Surface and Coating Technology， 2020， 404:126480.

[11] LEE S， AHMADI Z， PEGUES J W， et al.Laser polishing for improving fatigue performance of additive manufactured Ti-6Al-4V parts [J].Optics and Lasers in Engineering，2020， 134: 106639.

[12] CHEN L， RICHTER B， ZHANG X， et al.Modification of surface characteristics and electrochemical corrosion behavior of laser powder bed fused stainless-steel 316L after laser polishing [J].Additive Manufacturing， 2019， 32: 101013.

[13] BASHA S M， BHUYAN M， BASHA M M， et al.Laser polishing of 3D printed metallic components:a review on surface integrity [J].Materials Today: Proceedings， 2020， 26(2): 2 047－2 054.

[14] MARKL M， Körner C.Multiscale modeling of powder bedbased additive manufacturing [J].Annual Review of Materials Research， 2016， 46(1): 93－123.

[15] EBRAHIMI A， KLEIJN C R， RICHARDSON I M.A simulation-based approach to characterise melt-pool oscillations during gas tungsten arc welding [J].International Journal of Heat and Mass Transfer， 2021， 164: 120535.

[16] TAMANNA N，CROUCH R，NAHER S.Progress in numerical simulation of the laser cladding process [J].Optics and Lasers in Engineering， 2019， 122: 151－163.

[17] TEMMLER A， WILLENBORG E， WISSENBACH K.Laser polishing: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII [C]/ /Proceedings of SPIE－The International Society for Optical Engineering.San Francisco: SPIE， 2012.

[18] 周 浩，赵振宇，周后明，等.S136D 模具钢表面双激光抛光技术研究[J].表面技术，2021，50(11):111－120.ZHOU H， ZHAO Z Y， ZHOU H M， et al.Study on Dualbeam Laser Polishing of Surface of S136D Die Steel [J].Surface Technology， 2021， 50(11): 111－120.

[19] 刘二举，徐 杰，陈 曦，等.激光抛光技术研究进展与发展趋势[J].中国激光，2023，50(16): 1600001.LIU E J， XU J， CHEN X， et al.Research advancement and development trend of laser polishing technology [J].Chinese Journal of Lasers， 2023， 50(16): 1600001.

[20] RAMOS J A， BOURELL D L， BEAMAN J J.Surface overmelt during laser polishing of indirect-SLS metal parts [J].Mrs Proceedings， 2002， 758: 19.

[21] RAMOS J A， BOURELL D L.Reducing surface roughness of metallic freeform-fabricated parts using non-tactile finishing methods [J].International Journal of Materials and Product Technology， 2004， 21(4): 297－316.

[22] TEMMLER A， LIU D， LUO J， et al.Influence of pulse duration and pulse frequency on micro-roughness for laser micro polishing (LμP) of stainless steel AISI 410 [J].Applied Surface Science， 2020， 510: 145272.

[23] UKAR E，LAMIKIZ A，López D E，et al.Laser polishing of tool steel with CO2 laser and high-power diode laser [J].International Journal of Machine Tools and Manufacture，2010， 50(1): 115－125.

[24] XU J L， ZOU P， WANG W J， et al.Study on the mechanism of surface topography evolution in melting and transition regimes of laser polishing [J].Optics ＆ Laser Technology， 2021， 139(6): 106947.

[25] 徐一帆，邵景珍，林 颖，等.硬脆材料的激光表面抛光研究进展[J].激光与光电子学进展，2022，59(13):32－39.XU Y F， SHAO J Z， LIN Y， et al.Research progress in laser surface polishing of hard and brittle materials [J].Laser ＆ Optoelectronics Progress， 2022， 59(13): 32－39.

[26] ZHANG C， ZHOU J， SHEN H.Role of capillary and thermocapillary forces in laser polishing of metals [J].Journal of Manufacturing Science and Engineering， Transactions of the ASME， 2017， 139(4): 041019.

[27] DUOCASTELLA M， ARNOLD C.Bessel and annular beams for materials processing [J].Laser Photonics Rev， 2012， 6(5):607－621.

[28] 胡璐瑶，金卫凤，黎建麟，等.纳秒激光加工中脉冲能量对熔体体积的影响[J].表面技术，2019，48(8):48－53.HU L Y， JIN W F， LI J L， et al.Effects of pulse energy on melt volume in nanosecond pulsed laser processing [J].Surface Technology， 2019， 48(8): 48－53.

[29] COURVOISIER F， LACOURT P A， JACQUOT M， et al.Surface nanoprocessing with nondiffracting femtosecond bessel beams [J].Optics Letter， 2009， 34(20): 3 163－3 165.

[30] AMAKO J， YOSHIMURA K， SAWAKI D， et al.Laserbased microprocesses using diffraction-free beams generated by diffractive axicons [J].Proceedings of SPIE－The International Society for Optical Engineering， 2005， 5 713:497－507.

[31] KOHNO M， MATSUOKA Y.Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens [J].JSME International Journal Series B Fluids and Thermal Engineering， 2004， 47(3): 497－500.

[32] ZENG D， LATHAM W P， KAR A.Optical trepanning with a refractive axicon lens system[C]/ /Proceeding SPIE 6290 Laser Beam Shaping VII 62900J.San Diego: SPIE， 2006.

[33] HU W， SHIN Y C， KING G.Effect of air breakdown with a focusing lens on ultrashort laser ablation [J].Applied Physics Letters， 2011， 99 (23): 234104.

[34] HEINKE R， EHRHARDT M， LORENZ P， et al.Dry etching of monocrystalline silicon using a laser-induced reactive micro plasma [J].Applied Surface Science Advances，2021， 6: 100169.

[35] EHRHARDT M，LORENZ P，HAN B，et al.Laser-induced reactive microplasma for etching of fused silica [J].Applied Physics A， 2020， 126(11):826.

[36] ZIMMER K，EHRHARDT M，LORENZ P，et al.Etching of SiC-SiC-composites by a laser-induced plasma in a reactive gas [J].Ceramics International， 2022， 48(1) : 90－95.

[37] HOSSAIN A M， EHRHARDT M， RUDOLPH M， et al.Dynamics and 2D temperature distribution of plasma obtained by femtosecond laser - induced breakdown[J].Journal of Physics D: Applied Physics， 2022， 55: 125204.

[38] MAI T A， LIM G C.Micromelting and its effects on surface topography and properties in laser polishing of stainless steel[J].Journal of Laser Applications， 2004， 16 (4):221－228.

[39] PERRY T L， WERSCHMOELLER D， DUFFIE N A， et al.Examination of selective pulsed laser micropolishing on microfabricated nickel samples using spatial frequency analysis[J].Journal of Manufacturing Science ＆ Engineering，2009， 131(2): 267－272.

[40] PERRY T L， WERSCHMOELLER D， LI X， et al.Pulsed laser polishing of micro-milled Ti6Al4V samples [J].Journal of Manufacturing Processes， 2009， 11(2): 74－81.

[41] MA C， VADALI M， LI X， et al.Analytical and experimental investigation of thermocapillary flow in pulsed laser micropolishing [J].Journal of Micro and Nano-Manufacturing， 2014， 2(2): 021010.

[42] VADALI M， MA C， DUFFLE N A， et al.Pulsed laser micro polishing:surface prediction model [J].Journal of Manufacturing Processes， 2012， 14(3): 307－315.

[43] WANG Q H， MORROW J D， MA C， et al.Surface prediction model for thermocapillary regime pulsed laser micro polishing of metals [J].Journal of Manufacturing Processes，2015， 20(1): 340－348.

[44] SIM B C， KIM W S.Melting and dynamic-surface deformation in laser surface heating [J].International Journal of Heat and Mass Transfer， 2004， 48(6): 1 137－1 144.

[45] 张伟康，戴 伟，郑志镇，等.激光抛光H13 模具钢自由表面演变的数值模拟与验证[J].中国激光，2019，46(7):75－85.ZHANG W K， DAI W， ZHENG Z Z， et al.Numerical simulation and verification of free-surface evolution in laser polishing of H13 tool steel [J].Chinese Journal of Lasers，2019， 46(7): 75－85.

[46] ZHOU H， ZHOU H M， ZHAO Z Y， et al.Numerical simulation and verification of laser - polishing free surface of S136D die steel [J].Metals， 2021， 11(3): 400.

[47] SHAO T M， HUA M， TAM H Y， et al.An approach to modelling of laser polishing of metals [J].Surface and Coatings Technology， 2005， 197(1): 77－84.

[48] LI K， ZHAO Z Y， ZHOU H M， et al.Numerical simulation of effect of different initial morphologies on melt hydrodynamics in laser polishing of Ti6Al4V [J].Micromachines，2021， 12(5): 581.

[49] YADAV K， MISHRA A.Numerical analysis of effect of surface active elements on marangoni flow in melt pool[C]/ /Comsol Conference.Bangalore: COMSOL， 2016.

[50] XU J L， ZOU P， WANG X， et al.Investigation into the laser polishing of an austenitic stainless steel [J].Optics and Laser Technology， 2023， 163: 109378.

[51] XU J L， ZOU P， LIU L， et al.Investigation on the mechanism of a new laser surface structuring by laser remelting[J].Surface and Coatings Technology，2022，443:128615.

[52] TEMMLER A， PIRCH N， LUO J， et al.Numerical and experimental investigation on formation of surface structures in laser remelting for additive-manufactured Inconel 718 [J].Surface and Coatings Technology， 2020， 403: 126370.

[53] XU J L，ZOU P，KANG D，et al.Research on the formation mechanism of the surface structure in transition regime of laser polishing 304 stainless steel [J].Optics ＆ Laser Technology， 2022， 149: 107906.

[54] 徐辑林，邹 平，王文杰，等.基于烧蚀原理的激光抛光的数值建模与分析[J].东北大学学报(自然科学版)，2020，41(12):1 760－1 766.XU J L， ZOU P， WANG W J， et al.Numerical modeling and analysis of laser polishing based on ablation principle[J].Journal of Northeastern University (Nature Science)，2020， 41(12): 1 760－1 766.

[55] EVDOKIMOV A，JASIEWICZ F，DOYNOV N，et al.Simulation of surface heat treatment with inclined laser beam[J].Journal of Manufacturing Processes， 2022， 81:107－114.

[56] ZHANG H， CHEN X， ZHANG W， et al.Effects of scanning speed on the polished surface quality of mold steel by dual-beam coupling nanosecond laser [J].Materials，2023，16: 1 477.

[57] XIE S J，JIANG K，WANG L，et al.A study on the dynamic evolution mechanism of the steady magnetic field on the internal flow behavior of a laser melting pool[J].Metals，2023， 13: 720.

[58] MARIMUTHU S， TRIANTAPHYLLOU A， ANTAR M，et al.Laser polishing of selective laser melted components[J].International Journal of Machine Tools ＆ Manufacture，2015， 95: 97－104.

[59] SOLHEID J S，ELKASEER A，WUNSCH T，et al.Multiobjective optimization of laser polishing of additively manufactured Ti-6Al-4V parts for minimum surface roughness and heat-affected zone [J].Materials， 2022， 15: 3323.

[60] WANG Y M，LI Y H，GUAN Y C.Surface modification and mechanical properties of laser powder bed fusion Inconel 718 after magnetic-assisted laser polishing [J].Optics and Laser Technology， 2023， 162: 109291.

[61] CHOI J， SCHWARZ C.Advances in femtosecond laser processing of optical material for device applications [J].International Journal of Applied Glass Science， 2020， 11:480－490.

[62] ZHU P F， HAN J， XIE H， et al.Study of ultrafast laser polishing technology [J].Proceedings of SPIE， 2015，9449: 944934.

[63] ZHAO L J，CHENG J，CHEN M J，et al.Formation mechanism of a smooth， defect-free surface of fused silica optics using rapid CO2 laser polishing [J].International Journal of Extreme Manufacturing， 2019， 1(3): 035001.

[64] 吕可鑫，韩雪松.超快激光抛光硬脆光学材料工艺数值模拟研究[J].激光与光电子学进展，2021，58(5):0532001.LV K X， HAN X S.Research on numerical simulation of ultrafast laser polshing britte optical materials [J].Laser ＆Optoelectronics Progress， 2021， 58(5): 0532001.

[65] 贺 婷，曹 珍，魏朝阳，等.脉冲CO2激光高精度烧蚀熔石英玻璃[J].中国科学:物理学 力学 天文学，2020，50(3):115－123.HE T， CAO Z， WEI C Y， et al.High precision laser ablation of fused silica using pulsed CO2 laser [J].SCIENTIA SINICA Physica， Mechanica ＆ Astronomica， 2020， 50(3): 115－123.

[66] WANG D， FAN F， LIU M C， et al.Top-hat and Gaussian laser beam smoothing of ground fused silica surface [J].Optics and Laser Technology， 2020， 127: 106141.

[67] XU F， HU H， ZUO D， et al.Numerical analysis of Nd:YAG pulsed laser polishing CVD self-standing diamond film[J].Chinese Journal of Mechanical Engineering， 2013， 26(1): 121－127.

[68] 王懋露，梅 伟，杨立军，等.基于纳飞秒双脉冲激光的蓝宝石蚀除研究[J].中国科学:物理学 力学 天文学，2020，50(3):54－64.WANG M L， MEI W， YANG L J， et al.Investigation on sapphire ablation by femtosecond-nanosecond dual beam laser [J].SCIENTIA SINICA Physica， Mechanica ＆ Astronomica， 2020，50(3):54－64.

[69] GONG H， LI C F， LI Z Y.CW-laser-induced thermal and mechanical damage in optical materials [J].Proc SPIE，1999， 3578: 576－584.

[70] YAMADA K， UEDA T，HOKAWA A， et al.Thermal damage of silicon wafer in thermal cleaving process with pulsed laser and CW laser[C]/ /Laser-based Micropackaging.San Jose: SPIE， 2006.

[71] TANG H W， QIU P， CAO R X， et al.Repulsive magnetic field- assisted laser - induced plasma micromachining for high-quality microfabrication [J].International Journal of Advanced Manufacturing Technology， 2019， 102(5－8):2 223－2 229.