Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films

ZHAO Yanhui, ZHAO Xin, SONG Guihong

doi:10.16577/j.issn.1001-1560.2024.0277

Materials Protection >

2024 , Vol. 57 >Issue 12: 122 - 130

DOI: https://doi.org/10.16577/j.issn.1001-1560.2024.0277

Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films

Expand

(1.Sino-German Institute of Engineering， Shanghai Technical Institute Electronics ＆ Information， Shanghai 201411， China；2.School of Materials Science and Engineering， Shenyang University of Technology， Shenyang 110870， China)

ZHAO Yanhui(1973－)， Ph.D.， Associate Researcher， Research Focus: PVD Coatings and Protective Coatings，etc.， E-mail : pbaip2002＠126.com

Received date: 2024-04-13

Revised date: 2024-05-05

Accepted date: 2024-05-25

Online published: 2025-01-14

Fold

Abstract

To further improve the service life of the films in the marine environment，NiCrN films with different substrate bias voltages were deposited on a 304 stainless steel substrate by arc ion plating technology.The effects of the substrate bias voltage on the composition， microstructure， mechanical properties and corrosion resistance of the films were systematically investigated using scanning electron microscopy (SEM)，X-ray diffraction (XRD)， X-ray photoelectron spectroscopy (XPS)， nanoindentation， multifunctional surface properties tester and electrochemical workstation methods.Results showed that the films were primarily composed of metallic Cr， metallic Ni and CrN ceramic phases.As the bias voltage amplitude increased， the thickness and hardness of the films increased， then decreased.When the bias voltage amplitude was－150 V， the hardness reached the maximum value of 2 030 HV.When the substrate bias amplitude was－50 V， the film had the best wear resistance，and the wear rate was the lowest.The corrosion potential of the film shifted positively with the increase of substrate bias amplitude，and the corrosion current density was gradually reduced.When the bias amplitude was－150 V， the corrosion resistance of the film was the best.

Key words： arc ion plating; NiCrN thin film; microstructure; mechanical property

Cite this article

ZHAO Yanhui, ZHAO Xin, SONG Guihong . Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films[J]. Materials Protection, 2024 , 57(12) : 122 -130 . DOI: 10.16577/j.issn.1001-1560.2024.0277

Options

Outlines

模态框（Modal）标题

Abstract

Cite this article