Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films
Received date: 2024-04-13
Revised date: 2024-05-05
Accepted date: 2024-05-25
Online published: 2025-01-14
Key words: arc ion plating; NiCrN thin film; microstructure; mechanical property
ZHAO Yanhui, ZHAO Xin, SONG Guihong . Effect of Substrate Bias Voltage Amplitude on the Microstructure and Mechanical Properties of NiCrN Films[J]. Materials Protection, 2024 , 57(12) : 122 -130 . DOI: 10.16577/j.issn.1001-1560.2024.0277
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