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Process Optimization of Plasma Etching on the Size Reduction of Polystyrene Microspheres
SUN Shiyang, HUANG Shengbao, QIAN Yuanjin, LIU Dongkun, LI Jiabin, REN Yuan, ZHANG Wenxing
Materials Protection . 2025, (7): 58 -65 .  DOI: 10.16577/j.issn.1001-1560.2025.0114