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Effect of Bias Voltage on the Structure and Properties of AlTiSiN Coatings Deposited via High-Power Pulse Magnetron Sputtering
ZHAO Xinjie, HE Lei, XU Yi, XIA Yuan, LI Guodong
Materials Protection . 2025, (11): 28 -35 .  DOI: 10.16577/j.issn.1001-1560.2025.0186

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