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Control Effects and Optimization of Ion Source Power in HiPIMS Deposition of Alumina Thin Films
LIU Yaoyao, YANG Dongjie, CHEN Lingjie, CUI Suihan, LIU Liangliang, Wu Zhongzhen
Materials Protection . 2026, (9): 99 -106 .  DOI: 10.16577/j.issn.1001-1560.2026.0141

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