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Preparation of ta-C Film by High-Power Impulse Magnetron Sputtering Technology and Its Performance Modification
FENG Limin, SHI Jingwei, HE Zheqiu, LI Jianzhong, SHI Junjie
Materials Protection . 2024, (7): 23 -29 .  DOI: 10.16577/j.issn.1001-1560.2024.0147

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