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Influence of Bias Voltage on Microstructure and Properties of TiAlSiN Coatings Prepared by HiPIMS
DU Jianrong, TAO Guanyu, CHEN Hui, YI Juan, WAN Hong, LIU Shuyang, ZHANG Yu
Materials Protection . 2024, (7): 30 -42 .  DOI: 10.16577/j.issn.1001-1560.2024.0148

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